We pursue the development and application of atomic layer deposition (ALD) techniques, such as vapor-phase infiltration (VPI)/ sequential infiltration synthesis (SIS), towards the materials innovation in micro/nanoelectronics, solar energy conversion, catalysis, and membranes.
Combining the polymer nanopatterning based on conventional lithography and block copolymer self-assembly, we generate unique organic-inorganic hybrids and inorganic nanostructures with various functional applications
Our experimental strength in ALD techniques is combined with our longstanding expertise in advanced materials characterization and semiconductor device physics & fabrication.
Projects under progress:
- Application of ALD and VPI for microelectronics: a. Novel hybrid memristors for neuromorphic computing applications; b. Hybrid photoresists for EUV lithography.
- Hybrid polymer nanocomposite with unique material functionalities: VPI synthesis of organic-inorganic hybrid nanocomposite thin film with enhanced materials properties for: a. Gas/liquid/ion separation/exchange membranes; b. Enhanced mechanical properties for MEMS/NEMS applications
- Self-assembled electro-active metal oxide nanomesh structures: Combining block copolymer self-assembly, including directed self-assembly (DSA), and SIS to generate semiconductor nanostructures for electronic and sensing applications
- Efficient heterogeneous oxidation catalysts: Development of ALD methodologies for the synthesis of efficient heterogeneous oxidation catalysts for fuel cells, exhaust after-treatment devices, and chemical sensors.
- Organic-semiconductor-based solar water splitting: Exploring the application organic semiconductor thin films for efficient direct photoelectrochemical visible solar water splitting.
- Fundamentals in oxide, organic/hybrid, and 2D semiconductors: Development and investigation of new device concepts and fundamental properties in oxide, organic/hybrid, and 2D semiconductors, including: a. Energy transfer in ultrathin semiconductors and 2D materials; b. Optoelectronic properties of 2D semiconductors; c. Mitigation of degradation in hybrid perovskite solar cells and devices.